S8551, S8552 and S8553 are VUV (Vacuum UV) photodiodes suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, these photodiodes offer more stable sensitivity even after long exposure to VUV radiation compared with conventional types.

Features

Reliable detection improves of ArF excimer laser (λ=193 nm)

Large active area

S8551: 5.8 × 5.8 mm

S8552: 10 × 10 mm

S8553: 18 × 18 mm

Windowless package

S8551: TO-8 metal package

S8552: 16.5 × 15.0 mm ceramic package

S8553: 25.5 × 25.5 mm ceramic package

Applications

ArF excimer laser detection

Detection of various UV light sources