Features

 Digital measuring principle in CMOS technology

 Up to 8 capacitances in grounded mode

 Up to 4 capacitances in floating mode (potential- free and with zero bias voltage)

 Compensation of internal (grounded) and external parasitic capacities (floating)

 High resolution: up to 6 aF at 5 Hz and 10 pF base capacitance, or 17 bit resolution at 5 Hz with 100 pF base capacitance and 10 pF excitation

 High measurement rate: up to 500 kHz

 Extremely low current consumption possible: Down to 4 μA at 3 Hz with 13.4 bit resolution

Applications

 Humidity sensors

 Position sensors

 Pressure sensors

 Force sensors

 Acceleration sensors

 Inclination sensors

 Tilt sensors

 Angle sensors

 Wireless applications

 Level sensors

 Microphones

 MEMS sensors