Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated

The MPXL5010 low profile series piezoresistive transducer is a state–of–the–art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin–film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.

Features

• Low Profile Package

• 5.0 Maximum Error over 0° to 85°C

• Ideally Suited for Microprocessor or Microcontroller–Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Available in Differential and Gauge Configurations

• Also Available in Unibody Package (see MPX5010 Data Sheet)

Application Examples

• Hospital Beds

• HVAC

• Respiratory Systems

• Process Control