Features and Benefits

• Highest UV power to enable

high thr

oughput applications

• Excellent energy stability to

ensur

e high production yield

• EquiSwitch synchronization to

pr

ovide lowest jitter

• Laser data acquisition to allow

adv

anced process control

• Sealed and purged beam path

for stable long term oper

ation

• Ethernet interface for control

and fast data acquisition

Applications

• Excimer Laser Annealing

• Pulsed Laser Deposition