KEY FEATURES:

‹ Available with optional linear encoder

for ENHANCED PRECISION or stepper

verification

‹ Provides EXCELLENT GEOMETRIC

PERFORMANCE with anti-creep crossedroller

bearings

‹ Integrates with other linear, rotary &

vertical-lift MPS series stages for

RELIABLE MULTI-AXIS MOTION

‹ P ROTECTS AGAINST CONTAMINATION

with optional bellows waycover

‹ Available in VACUUM-COMPATIBLE

CONFIGURATIONS