FEATURES

► Ultralow noise density: 44 μg/√Hz (XY) and 55 μg/√Hz (Z)

► Low power consumption

► High performance: 520 μA

► Ultra-low power: 33 μA

► Wide bandwidth: 8 kHz

► Relative flatness with equalization: <0.5 dB

► Relative flatness without equalization: <3.5 dB

► Low latency: group delay <85 μs

► Digital features

► 16-bit ADC

► Multiprotocol serial interfaces: SPI or I2C

► Multiprotocol audio data output: I2S, TDM, and PDM

► Programmable LPF and HPF

► Data synchronous or asynchronous sampling

► Output FIFO: 320 word

► Built-in features for system-level power savings

► Single tap, double tap, or triple tap detection

► Activity and inactivity detection

► Configurable interrupt modes

► Integrated temperature sensor

► Voltage range options

► VS with internal regulators: 2.25 V to 3.6 V (or V1P8 at 1.8 V)

► VDDIO: 1.14 V to 3.6 V (1.62 V to 3.6 V for full temperature

range)

► Electromechanical self test

► 10,000 g mechanical shock survival

► RoHS compliant

► Operating temperature range: −40°C to +125°C

► 14-terminal, 2.9 mm × 2.8 mm × 0.87 mm, LGA package

APPLICATIONS

► Condition-based monitoring

► Structural health monitoring

► Seismic imaging

► Robotics

► Audio and active noise cancellation (ANC)

► Wearables and low power motion detection