Features

• Pressure range up to ±500Pa with high accuracy of ±3.0% m.v.

• Pressure based on thermal micro-flow measurement

• Outstanding hysteresis and repeatability

• Linearized and temperature compensated

• Digital I2C with 16bit resolution

• Cost effective

• RoHS and REACH compliant

• Minimum detectable pressure difference as low as 0.02 Pascal

Applications

• Medical CPAP and ventilator

• HAVC and building

• Burner control

• Filter monitoring

• Process control and automation

General Description

ACEINNA’s MDP200 series MEMS differential pressure sensors measure ultra-low gas pressures covering the range of up to ±500Pa (±2 inH2O). The technology is based on ACEINNA’s highly successful proprietary CMOS thermal accelerometers already sold in millions. ACEINNA’s thermal flow sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital format. The signal is linearized and temperature compensated. MDP200 series offers incredible sensitivity detecting pressure down below 0.02 Pascal near zero differential pressure. Other features include wide dynamic range, superb long-term stability, and outstanding repeatability and hysteresis.